Modeling and control of a piezoelectric microactuator with proprioceptive sensing capabilities

In this paper, modeling and control strategies for a new observability-optimized piezoelectric microactuator are presented. The targeted applications concern mainly the design of microgripper for micromanipulation tasks. The device has been designed using a topological optimization method, which takes into account the optimal full integration of piezoelectric actuating and sensing elements within the device. It is achieved in link with modal controllability and observability considerations. The vibrational modes that govern the tip deflection of the monolithic compliant structure are proved to be fully observable by the integrated sensing area of the device. The proposed control strategy permits to simply reconstruct the deflection using electric charges measurement and modal state observer. Finally, the vibrations naturally induced by the flexible structure are successfully damped using robust and low order controller.